Stages and Scanners for Rotary Motion
A rotation stage is a positioning device used to achieve high precision in a rotary motion. Composed by a base and a rotating platform on top it is propelled by one of several different technologies/drive options. Each stage and technology has differentiated features depending on your need for velocity, wobble, eccentricity or load.
We are happy to assist you with custom requests!
- Unlimited travel range
- Velocity range from <0.01 °/s to 1000s °/s
- Uniform software and 3rd party software drivers
- Absolute or incremental encoders and open-loop
- Vacuum compatible
Field of use
Applications such as optical metrology, imaging and automation as well as robotics and automation. Also used within Synchrotron, beamlines and for sample positioning.
Below you can find more information about specific product types. User the tabs to navigate and read more about the different product types.
DC & Stepper Motor
- Eccentricity – from 2.5 µm
- Resolution – From 0.00004 °/s
- Load – Up to 150 kg
- Velocity – Up to 200 °/s
A stepper motor divides a full revolution into a number of full steps with equal distance between them. As each step size is known, the stepper motor can operate in open-loop mode without any position sensors. A DC motor rotates constantly as an operating voltage is applied and the velocity is directly proportional to the input voltage. A linear stage utilizes bearing systems for guidance and encoders for position determination, there are various technologies to accommodate both and we offer a wide selection.
Links to our products
- Compact Size – From 14 mm platform
- Resolution – From 0.55 microradians
- Velocity – Up to 720 °/s
There are two main principal piezo motor drives we offer. Piezo inertia drives are compact and inexpensive piezo-based drives with high holding forces up to 10 N and medium travel range. Ultrasonic piezo motors are particularly suitable for applications that require fast precision positioning. The self-locking drive holds the position of the stage mechanically stable and optical encoders are optional for very high accuracy. The operating frequency of more than 20 kHz enables the runner to be directly driven at velocities of 720°/s.
Stage versions with non-contact optical linear encoder are available. With resolution down to 0.55 microradians. These stage feature a reference point switch as well.
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Magnetic Direct Motor/Drive
- Air bearing for ultra-precise motion
- Resolution – From 0.03 microradians
- Load – Up to 4 000 N
- Velocity – Up to 1000s °/s
The magnetic direct drive is based on a 3phase torque motor. This drive offers advantages compared to common spindle-based technologies as it has low friction, therefore less wear and backlash. With the air bearing this technology provides excellent position accuracy, constant and smooth velocity as well as high dynamics with best in class speed.
Suitable for scanning applications, wafer inspection, high precision tooling and alignment systems.