XY(Z) Stages

Sample holders for microscopy and metrology stages 

Metrology stages are used to achieve a planar horizontal motion often referred to as XY stages. Stability, precision and dynamics are crucial as well as the mechanical size, Magnetic linear and Piezo motors fit these requirements while air bearings and crossed rollers are used to get a very planar and friction free guidance. Microscopy stages are mainly used in high-resolution and scanning setups in the XYZ domain. Each stage and technology has differentiated features depending on your need of velocity, accuracy or load. The choice of drive and sensor technology is irrelevant as the controller software is uniform for any combination.

We are happy to assist you with custom requests!

Characteristics

  • Travel range up to 500 x 1000 mm 
  • Velocity range from 10 nanometer/s to 2 mm/s
  • Uniform software and 3rd party software drivers
  • Absolute or incremental encoders
  • Air bearing guidance

Field of use

These products are typically used in silicon photonics, metrology, inspection and microscopy.

Product technologies

Below you can find more information about specific product types. User the tabs to navigate and read more about the different product types.

DC & Stepper Motor

Technical information

  • Travel Range – Up to 205×205 mm
  • Resolution – From 10 nm
  • Load – Up to 250 N
  • Velocity – Up to 100 mm/s

More information

A stepper motor divides a full revolution into a number of full steps with equal distance between them. As each step size is known, the stepper motor can operate in open-loop mode without any position sensor. A DC motor rotates constantly as an operating voltage is applied and the velocity is directly proportional to the input voltage. These stages utilize bearing systems for guidance and encoders for position determination, there are various technologies to accommodate both and we offer a great selection

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Metrology Stages
Metrology Stages with DC & Stepper Motor Technology
Microscopy Stage
Microscopy Stage with DC & Stepper Motor Technology

Piezo Actuators

Technical information

  • Travel Range – Up to 300 x 300 x 300 µmeters
  • Resolution – <1 nm
  • Operating Frequency – Up to 700 Hz
  • Compact footprint – > 40 x 40 x 40 mm

More information

A Piezo actuator changes in length when a voltage is applied. Piezo actuators convert electrical energy directly into mechanical energy and vice-versa and allow for motions in the subnanometer range. The precision guidance combined with the lever amplification ensure long travel ranges and excellent accuracy. Determining the position is made with direct measurement with non-contact sensors.

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Compact & Dynamic XYZ Stages
Compact & Dynamic XYZ Stages
Stages with Aparture
Stages with Aparture

Piezo Motors

Technical information

  • Travel Range – Up to 135 x 85 mm
  • Resolution – From 10 nm
  • Load – Up to 25 N
  • Velocity – Up to 200 mm/s

More information

There are two main principals regarding piezo motor drives. The first is piezo inertia drives which are compact and inexpensive piezo-based drives with high holding forces up to 10 N and medium travel range. The second is ultrasonic piezo motors are particularly suitable for applications that require fast precision positioning. The self-locking drive holds the position of the stage mechanically stable and optical encoders are optional for very high accuracy.

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Metrology Stages
Metrology Stages with Piezo Motor Technology
Microscopy Stage
Microscopy Stage with Piezo Motor Technology

Magnetic Direct Motor/Drive

Technical information

  • Travel Range – Up to 1 m
  • Resolution – From 1 nm
  • Load – Up to 250 N
  • Velocity – Up to 2 m/s

More information

Voice coil actuators and magnetic linear drives utilize the fact that the force acting on a current carrying conductor in a magnetic field is proportional to the strength of the magnetic field and the current. This drive offers advantages compared to common spindle-based technologies as it uses few mechanical components. The result is less friction, less wear and less backlash enabling better precision as well as achieving much higher dynamics.

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Metrology Stages
Metrology Stages with Magnetic Direct Motor/Drive
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